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履修条件
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Lectures will be given assuming that you have the knowledge on fundamental solid state physics, but it is not necessary condition.
However, it is necessary for you to have curiosity on advanced fabrication and growth technology in nanoscale.
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授業概要
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Rapidly developing nanotechnology gives us the broad fundamental technologies, such as layer-by-layer assembling of materials and fabrication of the structures on nano-scale. This lecture surveys the current state of the art for nanoscience and nanofabrication and gives an idea of how to apply them for your purposes. Especially, the details of atomic layer deposition (ALD) technique will be taught from the fundamentals on chemical and physical mechanisms to various applications. This lecture takes a hands-on approach, in which you can deepen your thought on topics.
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全体の教育目標
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It is aimed to provide broad knowledge on nanofabrication and nanogrowth for students in different fields. The lecture is given in a handy way to discuss each topic among students. However, it is also provided the background of the physical or chemical principles, which can help fully understanding of the phenomena and give insights to apply for other capabilities.
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個別の教育目標
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General view of nano-scaled objects
Understanding general methods on nanofabrication
Fundamentals on quantum devices
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授業計画
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L1. What is nano-world?
L2. What means nano-materials? -Overview of nano-materials-
L3. How can we make small structures? -Overview of fabrication processes-
L4. Thin film growth: various methods for growth
L5. Nano-growth: Atomically controlled film growth
L6. Quantum metrology
L7. Making shapes: etching/milling and self-assembly
L8. What is lithography? -Overview of photolithography -
L9. Lithography by particles: electron and ion beams
L10. Analogy of usual patterning: nanoimprint
L11. Evaluation of small structures: Characterization
L12. What is the properties of nano-devices?
L13. Quantum/nano devices
L14. Commercialization: Productivity and Risk assessment
L15. Report submission
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キーワード
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atomic layer deposition, nano-fabrication, nanotechnology, surface science
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授業の進め方
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The lecture is composed of general talk on each topic and specific discussion among attendancea which deepen your interests and understanding.
Lectures will be held on the following days: 15 Oct, 22 0ct, 5 Nov, 12 Nov, 19 Nov, 3 Dec, 10 Dec, 17 Dec, 7 Jan, 15 Jan, 21 Jan, 28 Jan, 4 Feb, 12 Feb.
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テキスト
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Lecture notes can be given in PDF format in advance.
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参考書
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References will be given.
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学習相談
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試験／成績評価の方法等
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Attendance & quiz: 60%, Final report: 40%
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その他
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添付ファイル
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更新日付
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2018-09-28 10:19:08.853
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